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This NIST report documents the design, fabrication and certification of a step-height reference material for three-dimensional surface measurement. The standards contain parallel plateaus separated by steps of different nominal heights, allowing microscopes to be evaluated across a useful measurement range.
The report explains how coherence-scanning interference microscopy was used to calibrate the steps and how the resulting measurements were treated statistically. An uncertainty budget connects the experimental method with the certified values, while mechanical drawings show the geometry of the standards. The complete original publication preserves all figures, tables, references and both drawing appendixes.
Michael T. Stocker, Thomas B. Renegar, Johannes A. Soons, Ulf Griesmann, Sandra W. Young and Mark R. Stoudt (2024). Certification of Standard Reference Material 2323: Step Height Standard for Areal Surface Topography Measurement. National Institute of Standards and Technology. https://doi.org/10.6028/NIST.SP.260-249. Republished courtesy of the National Institute of Standards and Technology.